Pennington NJ: The Electrochemical Society, 1998.
Hardcover. Very Good with no dust jacket. Item #6332
Library stamps/marks/labels/pocket, otherwise light wear. Crisp hardcover.; "Held as a part of the Joint International Meeting of the Electrochemical Society, Inc. and the International Society for Electrochemistry in Paris, France, Aug. 31-Sept. 5, 1997"--P. iii. 192nd ECS Meeting. "Both fundamental and applied aspects will be emphasized, related to the following topics used in the fabrication of submicron semiconductor devices: plasma processes and reactors; photochemical (laser, UV) processes for etching, deposition, and surface cleaning; rapid thermal processing; and process diagnostics, control, and modeling related to thin film processes." ; Proceedings (The Electrochemical Society); Ex-Library; Vol. 97-30; ix, 370 pages.